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Science: Physics: Publications
The Journal of Vacuum Science and Technology A
- Devoted to reports of original research, review articles, and Critical Review articles. JVST A includes topics such as applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.
The Journal of Vacuum Science and Technology B
- Provides a vehicle for the publication of research dealing with microelectronics and nanometer structures.
Vacuum - International Journal
- Typical papers cover new developments in vacuum pumping and instrumentation, vacuum measurement, kinetic theory, gas-surface interactions, surface analysis, plasma and ion-surface interactions and etching, nanometer-scale processing, ion implantation, surface modification and coating industry, PVD, CVD and ion/plasma-assisted PVD/CVD.
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