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  • The Journal of Vacuum Science and Technology A - Devoted to reports of original research, review articles, and Critical Review articles. JVST A includes topics such as applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.
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  • The Journal of Vacuum Science and Technology B - Provides a vehicle for the publication of research dealing with microelectronics and nanometer structures.
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  • Vacuum - International Journal - Typical papers cover new developments in vacuum pumping and instrumentation, vacuum measurement, kinetic theory, gas-surface interactions, surface analysis, plasma and ion-surface interactions and etching, nanometer-scale processing, ion implantation, surface modification and coating industry, PVD, CVD and ion/plasma-assisted PVD/CVD.
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Last update: May 20, 2016 at 20:24:06 UTC - edit